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Polishing Slurry

Polishing Slurry

 Polishing Slurry


Nano diamond slurry

1.Application fields

(1)Polishing of semiconductor wafer: monocrystalline silicon wafer, polycrystalline silicon wafer, sapphire wafer, silicon carbide wafer, etc.;

(2)Polishing of magnetic recording materials: computer hard disk substrate, computer hard disk head, etc.

2.Product Specifications

Product type Appearance Carrier type
NDS/50 Black suspension water based
NDS/100 grey suspension 水基

Special requirements can be tailor-made.

3.Product characteristics

(1)The unique super dispersion technology makes the product have good dispersion effect;

(2)It can achieve angstrom surface processing effect.


Silica slurry

1.Application fields

(1)Processing of semiconductor wafer: mainly including sapphire substrate, silicon carbide wafer, sapphire window wafer, etc.;

(2)processing of ceramic material: zirconia fingerprint identification sheet, zirconia ceramic phone back cover and other functional ceramics;

(3)Processing of other materials: optical glass, metal materials, hard alloy, etc.

2.Product Specifications

Product type Appearance Solid content(%wt) pH
SiOF/80 Milky white suspension 20-40 10-11
SiOF/100 Milky white suspension 20-40 10-11

Special requirements can be tailor-made.

3.Product characteristics

(1)Uniform particle size, high polishing efficiency;

(2)The surface roughness of polished wafer Ra<0.2 nm.

 


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